Solid surface observation method and apparatus therefor, and electronic apparatus formed of the solid surface observation apparatus and method of forming the electronic apparatus
AssigneeHitachi, Ltd.
InventorsMunehisa Mitsuya, Yasuo Wada, Seiji Heike, Seiichi Kondo
Life of this patent
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Abstract
A surface of an insulator or semiconductor substrate is irradiated with a beam such as an electron beam, an electromagnetic wave beam, an ion beam, etc. to excite carriers so as to form an electrical conductive layer on the surface of and in the inside of the substrate to thereby make it possible to perform observation and micro working on the insulator by using a scanning tunneling microscope.
Claims17
A method of observing an electrically insulating surface of a material, comprising the steps of:
- irradiating the surface with a beam so that the surface is made electrically conductive, wherein the beam is selected from a group consisting of an electron beam and an ion beam;
- positioning an electrode probe of a scanning tunneling microscope close to the surface being irradiated, and applying a predetermined electric voltage between the electrode probe and the surface;
- and
- detecting a tunneling current flowing between the electrode probe and the surface.
A substrate surface observing method, wherein a surface of an electrical conductive substrate capable of transitioning to an electrical insulator reversibly or non-reversibly is observed through a local electric filed applied between the surface of said substrate and a tunneling probe in a condition in which said substrate is made conductive by irradiation with a beam selected from a group consisting of an electron beam and an ion beam.
A method of forming an electronic device on an electrically insulating surface of a material comprising the steps of:
- irradiating the surface with a beam so that the surface is made electrically conductive, wherein the beam is selected from a group consisting of an electron beam, an ion beam and an electromagnetic wave;
- positioning an electrode probe of a scanning tunneling microscope close to the surface being irradiated, and applying a predetermined electric voltage between the electrode probe and the surface;
- and
- positioning atoms on the surface by said scanning tunneling microscope so as to form an electronic device on the surface.
A method of forming an electronic device which is obtained by positioning atoms or molecules on a surface of a substrate which is capable of changing electrical conductivity by electron or electromagnetic wave irradiation, changing a temperature of said substrate, de-doping impurities, or chemical change, through a local electric field applied between said substrate and a tunneling probe.
An electronic device produced by positioning atoms or molecules on a surface of an electrical conductive substrate capable of transitioning to an electrical insulator reversibly or non-reversibly, through a local electric field applied between the surface of said substrate and a probe in a condition in which said substrate is made conductive by irradiation with a beam selected from a group consisting of an electron beam and an ion beam.
Dependencies are inferred from the claim text.