Polyfunctional vinyl ether compound and photoresist resin composition containing the same
AssigneeSumitomo Chemical Company, Limited
InventorsShigeo Hozumi, Shinichiro Kitayama, Hiroya Nakagawa
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AssigneeSumitomo Chemical Company, Limited
InventorsShigeo Hozumi, Shinichiro Kitayama, Hiroya Nakagawa
Estimating the term…
A polyfunctional vinyl ether compound represented by formula (I): ##STR1## wherein n, which is an average repeating number, represents a number of from 0 to 20; R.sub.1 and R.sub.2 each independently represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group, an aralkyl group, an alkoxy group, an aryloxy group, or a cycloalkyl group; Q each independently represents --OH or a group represented by the formula --OROCH.dbd.CH.sub.2, wherein R represents an alkylene group having from 1 to 12 carbon atoms, the molar ratio of (--OH)/(--OROCH.dbd.CH.sub.2) being from 10/90 to 90/10; and A each independently represents a divalent hydrocarbon group having from 1 to 30 carbon atoms.
A polyfunctional vinyl ether compound represented by formula (I):
A polyfunctional vinyl ether compound represented by formula (I):
A polyfunctional vinyl ether compound represented by formula (VI):
Dependencies are inferred from the claim text.