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AssigneeGeorgia Tech Research Corporation
InventorsAjeet Rohatgi, Zhizhang Chen, Parag Doshi
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Processes which utilize rapid thermal processing (RTP) are provided for inexpensively producing high efficiency silicon solar cells. The RTP processes preserve minority carrier bulk lifetime .tau. and permit selective adjustment of the depth of the diffused regions, including emitter and back surface field (bsf), within the silicon substrate. Silicon solar cell efficiencies of 16.9% have been achieved. In a first RTP process, an RTP step is utilized to simultaneously diffuse phosphorus and aluminum into the front and back surfaces, respectively, of a silicon substrate. Moreover, an in situ controlled cooling procedure preserves the carrier bulk lifetime .tau. and permits selective adjustment of the depth of the diffused regions. In a second RTP process, both simultaneous diffusion of the phosphorus and aluminum as well as annealing of the front and back contacts are accomplished during the RTP step. In a third RTP process, the RTP step accomplishes simultaneous diffusion of the phosphorus and aluminum, annealing of the contacts, and annealing of a double-layer antireflection/passivation coating SiN/SiO.sub.x.
A process utilizing an in situ controlled cooling procedure for producing a junction between a diffused region and a bulk silicon region within a silicon substrate, while preserving carrier bulk lifetime within the bulk silicon region and while permitting selective adjustment of the depth of the diffused region within the silicon substrate, comprising the sequential steps of:
A process for efficiently producing a solar cell for generating electrical energy from light, the process comprising the sequential steps of:
A process for efficiently producing a solar cell for generating electrical energy from light, the process comprising the sequential steps of:
A process for efficiently producing a solar cell for generating electrical energy from light, the process comprising the sequential steps of:
A process for efficiently producing a solar cell for generating electrical energy from light, the process comprising the sequential steps of:
A process utilizing an in situ controlled cooling procedure for producing a junction between a diffused region and a bulk silicon region within a silicon substrate, while preserving carrier bulk lifetime within the bulk silicon region and while permitting selective adjustment of the depth of the diffused region within the silicon substrate, comprising the sequential steps of:
A process of utilizing an in situ controlled cooling procedure for producing a junction between a diffused region and a bulk silicon region within a silicon substrate, while preserving carrier bulk lifetime within the bulk silicon region and while permitting selective adjustment of the depth of the diffused region within the silicon substrate, comprising the sequential steps of:
Dependencies are inferred from the claim text.