Durable wideband anti-reflection coating for infrared windows
AssigneeTexas Instruments Incorporated
InventorFrank C. Sulzbach
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Abstract
An ultra hard, wideband anti-reflection coating for an IR window, such as GaAs, which resists environmental and chemical attack. The coating is designed to allow spectral transmission therethrough in a wide band, namely the 3 to 12 micron range. A cladding layer is formed on the GaAs window. A first diamond like carbon (DLC) layer is then formed on the first bonding layer. A bonding layer is formed on the first DLC layer and a second DLC layer is formed on the bonding layer.
Claims11
An ultra hard, wide band anti-reflection coating for a window comprising:
- a semiconductor window having an index of refraction between 2.9 and 3.5;
- a cladding layer to provide durability and promote bonding on said window;
- a first diamond like carbon layer on said cladding layer;
- a semiconductor layer on said first diamond like carbon having an index of refraction between 2.7 and 4.0;
- and
- a second diamond like carbon layer on said semiconductor layer.
An ultra hard, dual band anti-reflection coating for an IR window comprising:
- a first silicon layer of predetermined thickness;
- a first diamond like carbon layer less than 0.5 micron thick on said first silicon layer;
- a second silicon layer less than 0.5 micron thick on said first diamond like carbon layer;
- and
- a second DLC layer less than 1 micron thick on said second silicon layer to produce a coating which passes radiation in both the 3-5 and 8-12 micron range.
Dependencies are inferred from the claim text.