Method and apparatus for manufacturing needle shaped materials and method for manufacturing a microemitter
AssigneeKabushiki Kaisha Toshiba
InventorYoshiaki Akama
Life of this patent
Estimating the term…
Abstract
A method and apparatus exists for manufacturing needle-shaped materials for use as microemitters, wherein a light beam output from a light source is split into a plurality of beams and the split light beams are focused by an optical system and directed into a chamber having a gas containing electroconductive molecules. The electroconductive molecules are degraded through excitation by the beams directed into the chamber to deposit needle-shaped materials on a substrate disposed in the chamber. By so doing, a plurality of needle-shaped materials are simultaneously produced on the substrate in accordance with a corresponding number of beams obtained through splitting.
Claims17
A method for manufacturing needle-shaped materials on a substrate, comprising the steps of:
- focusing a plurality of excitation beams and introducing these excitation beams into a hermetically sealed atmosphere where electroconductive molecules are present;
- and
- degrading the electroconductive molecules through excitation by the excitation beams in the hermetically sealed atmosphere to concurrently form needle-shaped materials on a substrate.
An apparatus for concurrently manufacturing needle-shaped materials, as deposited materials, on a substrate by degrading electroconductive molecules in a gas atmosphere through excitation by an excitation beam, comprising:
- a source for outputting the excitation beam;
- splitting means for splitting the excitation beam into a plurality of beams;
- focusing means for focusing these beams obtained through splitting;
- and
- a chamber in which the electroconductive molecules and substrate can be held therein and where the beams focused by the focusing means are directed onto the substrate to allow needle-shaped materials to be deposited on the substrate.
An apparatus for concurrently manufacturing needle-shaped materials, as deposited materials, on a substrate by degrading electroconductive molecules through excitation by an excitation beam, comprising:
- a source having a plurality of cathodes to allow electron beams to be output from the respective cathodes;
- focusing means for focusing these electron beams output from the cathodes;
- and
- a chamber in which the electroconductive molecules are present and the substrate is arranged and into which the electron beams focused by the focusing means are introduced.
A method for manufacturing an electric field emission element having a plurality of needle-shaped emitter electrodes on an array substrate, comprising the step of:
- splitting an excitation beam into a plurality of beams;
- focusing these beams obtained through splitting and directing the beams into a hermetically sealed atmosphere containing electroconductive molecules;
- and
- degrading the electroconductive molecules through excitation by the respective beams directed into the hermetically sealed atmosphere and concurrently forming needle-shaped materials, as deposited materials, on the array substrate to provide emitter electrodes.
Dependencies are inferred from the claim text.