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US 5,509,464 AGranted
Method and apparatus for cooling rectangular substrates
AssigneeApplied Materials, Inc.
InventorsNorman Turner, John White, Alfred Mak
Life of this patent
Estimating the term…
Abstract
A rectangular substrate is cooled while it is processed under vacuum in a reaction chamber on a rectangular cooling pedestal having a cooling surface that has a downwardly curving convex shape. The substrate is clamped to the pedestal such that it conforms with a pedestal cooling surface profile. As a result the number of voids between the substrate surface and the pedestal cooling surface are minimized. This promotes consistent cooling of the substrate across the entire substrate surface when the substrate is processed at high RF power levels, by allowing the substrate to be subjected to high levels of backside cooling medium pressure which efficiently propagates heat across such gap from the substrate to the pedestal.
Claims20
A method for cooling a rectangular glass substrate, comprising the steps of:
- positioning said substrate with a substrate surface proximate to a rectangular pedestal having a convex cooling surface, said convex pedestal cooling surface curving downwardly from a pedestal center line;
- and
- conforming said substrate to said cooling surface while providing a coolant medium under pressure between said substrate surface and said pedestal surface;
- wherein said pedestal cooling surface has a downward curvature that is greater than the amount of substrate bending which would result from the amount of pressure which is to be applied by said coolant medium on said substrate surface;
- and
- wherein said downward curvature is sufficient to bend said substrate, such that said substrate surface is brought into an intimate conforming relationship with said pedestal surface, and such that voids between said substrate surface and said cooling surface are minimized.
3 more elements
An apparatus for cooling a rectangular substrate, comprising:
- a rectangular pedestal having a convex cooling surface having a pedestal center line, said convex pedestal cooling surface curving downwardly from said pedestal center line;
- means for positioning said substrate at a substrate surface proximate to said cooling surface thereby conforming said substrate to said cooling surface;
- and
- a coolant medium provided under pressure to said substrate surface;
- wherein said pedestal cooling surface has a downward curvature that is greater than the amount of substrate bending which would result from the amount of pressure which is to be applied by said coolant medium on said substrate surface;
- and
- wherein said downward curvature is sufficient to bend said substrate, such that said substrate surface is brought into an intimate conforming relationship with said pedestal surface, and such that voids between said substrate surface and said cooling surface are minimized.
4 more elements
A method for cooling a rectangular glass substrate, comprising the steps of:
- positioning said glass substrate with a substrate surface proximate to a rectangular pedestal having a convex cooling surface, said convex pedestal cooling surface curving downwardly from a pedestal center line, said downwardly curved pedestal surface being a multiply stepped or beveled slope that sufficiently approximates a smoothly curving surface, said pedestal cooling surface having a downward curvature that is greater than an amount of glass substrate bending which would result from the amount of pressure which is to be applied by an inert gas on said glass substrate surface;
- and
- bending said glass substrate, such that said glass substrate surface is brought into an intimate conforming relationship with said pedestal surface, and such that voids between said glass substrate surface and said cooling surface are minimized;and
- providing an inert gas under pressure between said glass substrate surface and said pedestal surface;
- wherein said substrate is cooled during processing under vacuum in a reaction chamber.
2 more elements
An apparatus for cooling a rectangular glass substrate, comprising:
- a rectangular pedestal having a convex cooling surface having a pedestal center line, said convex pedestal cooling surface curving downwardly from said pedestal center line, said downwardly curving pedestal surface being a multiply stepped or beveled approximation of a smoothly curving surface, said pedestal cooling surface having a downward curvature that is greater than an amount of glass substrate bending which would result from the amount of pressure which is to be applied by an inert gas on said glass substrate surface;
- means for positioning said glass substrate at a substrate surface proximate to said cooling surface thereby conforming said glass substrate to said cooling surface, said downward curvature being sufficient to bend said glass substrate, wherein said glass substrate surface is brought into an intimate conforming relationship with said pedestal surface, such that voids between said glass substrate surface and said cooling surface are minimized;
- and
- an inert gas provided under pressure to said glass substrate surface;
- wherein said glass substrate is cooled during processing under vacuum in a reaction chamber.
2 more elements
A method for cooling a rectangular glass substrate, comprising the steps of:
- positioning said glass substrate with a substrate surface proximate to a rectangular pedestal having a convex cooling surface, said convex pedestal cooling surface curving downwardly from a pedestal center line, said downwardly curved pedestal surface being a multiply stepped or beveled slope that sufficiently approximates a smoothly curving surface, said pedestal cooling surface having a downward curvature that is greater than an amount of glass substrate bending which would result from the amount of pressure which is to be applied by an inert gas on said glass substrate surface, said rectangular substrate having a longer dimension and a shorter dimension, said longer dimension running either parallel to said cooling surface center line or perpendicular to said center line;
- bending said glass substrate, such that said glass substrate surface is brought into an intimate conforming relationship with said pedestal surface, and such that voids between said glass substrate surface and said cooling surface are minimized;
- and
- providing an inert gas under pressure between said glass substrate surface and said pedestal surface;
- wherein said substrate is cooled during processing under vacuum in a reaction chamber.
2 more elements
An apparatus for cooling a rectangular glass substrate, comprising:
- a rectangular pedestal having a convex cooling surface having a pedestal center line, said convex pedestal cooling surface curving downwardly from said pedestal center line, said downwardly curving pedestal surface being a multiply stepped or beveled approximation of a smoothly curving surface, said pedestal cooling surface having a downward curvature that is greater than an amount of glass substrate bending which would result from the amount of pressure which is to be applied by an inert gas on said glass substrate surface, said rectangular substrate having a longer dimension that runs either parallel to said cooling surface center line or perpendicular to said center line;
- means for positioning said glass substrate at a substrate surface proximate to said cooling surface thereby conforming said glass substrate to said cooling surface, said downward curvature being sufficient to bend said glass substrate, wherein said glass substrate surface is brought into an intimate conforming relationship with said pedestal surface, such that voids between said glass substrate surface and said cooling surface are minimized;
- and
- an inert gas provided under pressure to said glass substrate surface;
- wherein said glass substrate is cooled during processing under vacuum in a reaction chamber.
2 more elements
Dependencies are inferred from the claim text.