Diaphragm pressure sensor including anti-stock protection means and gradiomanometer incorporating such a sensor
AssigneeSchlumberger Technology Corporation
InventorsEric P. Donzier, Fadhel Rezgui
Life of this patent
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Abstract
A pressure sensor (20) comprises a deformable diaphragm (22) which closes a fluid passage (18) in sealed manner. In order to protect the diaphragm (22) from shocks, the passage includes a restriction (44) whose dimensions are so designed as to limit the pressure peak applied to the diaphragm to a cutoff value which the diaphragm can withstand. The restriction (44) may be formed in a detachable capillary tube (42) or it may be in the form of grooves in a small silicon plate integrated in the active portion of the sensor.
Claims20
A pressure sensor comprising a deformable diaphragm closing a fluid passage in sealed manner, and means for measuring deformation of the diaphragm, said passage including a restriction so designed as to co-operate with the diaphragm to form a lowpass filter with a determined cutoff frequency (f.sub.O).
A gradiomanometer comprising a passage filled with liquid and having ends that open out at two spaced-apart locations, and a differential pressure sensor located in said passage, said sensor comprising a deformable diaphragm closing said passage in sealed manner, and means for measuring deformation of the diaphragm, said passage including a restriction so designed as to co-operate with the diaphragm to form a lowpass filter with a determined cutoff frequency (f.sub.O).
Dependencies are inferred from the claim text.