Probe having a power detector for use with microwave or millimeter wave device

A device for probing an integrated circuit which comprises:

• a probe including a probe tip, a ground plane, and a signal conductor adapted to conduct an AC signal from an AC power source to the probe tip, said signal conductor connected to said probe tip and coupled to said ground plane;
• a power detector mounted on the probe operable to generate a DC signal in response to and indicative of, the power of an AC signal received at the probe tip from the AC power source;
• and
• a feedback loop adapted to conduct a DC signal as a power control signal from the power detector to the AC power source.

An apparatus for probing a contact point of an integrated circuit comprising:

• an AC power source;
• a probe, including a probe body, a probe tip at one end of the probe body, and a planar waveguide extending along the probe body from the probe tip to a first location of the probe body;
• a coaxial conductor interconnecting the power source and the planar waveguide at said first location of the probe body;
• a power detector mounted co-planar to said waveguide and proximate the probe tip operable to generate a DC signal in response to an AC signal received at the probe tip from the power source;
• and
• a feedback circuit arranged to conduct a DC signal as a power control signal from the power detector to the AC power source.

A method of controlling the power delivered by a power source to a circuit, comprising the steps of:

• generating a wave signal with said power source;
• transmitting said wave signal from said power source to a probe;
• monitoring the power of said wave signal within said probe;
• transmitting a control signal from said probe to said power source, said control signal indicative of the power of said wave signal within said probe;
• adjusting said power source in response to said control signal.