Scanning probe type microscope apparatus
AssigneeNikon Corporation
InventorsTetsuji Onuki, Masatoshi Suzuki, Toru Fujii, Hiroyuki Matsushiro, Hideaki Ohkubo
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Abstract
A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.
Claims13
A scanning probe type microscope apparatus having a probe for scanning a sample surface and an optical microscope mounted on a table in common with said scanning probe type microscope for simultaneously observing a terminal end of said probe and said surface through the visual field of said optical microscope comprising:
- a first supporting member for individually supporting said optical microscope and a second supporting member for individually supporting said probe inside the visual field of said optical microscope and independent of said first supporting member with said optical microscope, said first supporting member and said second supporting member being commonly mounted on said table, and wherein said second supporting member has a double-end-support beam construction comprising a beam portion and first and second mounting column portions for fixedly supporting said beam portion to said table at opposite ends of said beam portion respectively, said probe being positioned substantially intermediate of said bean portion from said opposite ends.
Dependencies are inferred from the claim text.