Method of manufacturing a magnetic storage medium
AssigneeNEC Corporation
InventorMasahiro Yanagisawa
Life of this patent
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Abstract
A magnetic storage medium includes a substrate, a protective film, and a lubricant film. The substrate includes a magnetic body. The protective film is formed on the substrate and constituted by a carbon thin film having dangling bonds formed on a surface thereof. The lubricant film is coated on the protective film and bonded to some of the dangling bonds. An adsorption site ratio (density of dangling bonds/density of functional groups of lubricant film) which is a ratio of the density of the dangling bonds to the density of functional groups of the lubricant film exceeds 1.
Claims6
A method of manufacturing a magnetic storage medium, comprising the steps of:
- forming a protective film constituted by a carbon thin film on a substrate including a magnetic body in a vacuum atmosphere;
- forming dangling bonds on a surface of said protective film by mechanically abrading the surface of said protective film in the vacuum atmosphere in which said protective film is formed;
- and
- coating a lubricant film on said protective film in which dangling bonds are formed in the vacuum atmosphere.
Dependencies are inferred from the claim text.