Process for producing an electronic part and the electronic part produced by the process
AssigneeHitachi, Ltd.
InventorsYukio Sakemura, Mitsuru Usui, Tetsuya Watanabe
Life of this patent
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Abstract
An electronic part is produced by forming two metallic wiring films of different materials on a main substrate, where a first metallic wiring film is formed on the main substrate, a protective film is formed in desired regions on the main substrate and the first metallic wiring film, and a second metallic wiring film is formed on the first metallic wiring film. The thus produced electronic part has an insulating protective film between the first and second metallic wiring films. By the presence of the protective film the surface of the first metallic wiring film is protected from etching, corrosion or deterioration by an agent for patterning the second metallic wiring film.
Claims11
A process for producing an electronic part, which comprises:
- a step of providing a main substrate through which sintered metallizings are provided from the front side to the back side,
- a step of forming pads for wiring extension at positions of the sintered metallizings on the front side of the main substrate,
- a step of forming a first metallic wiring film on the pads for wiring extension,
- a step of forming a protective film in desired regions on the main substrate and the first metallic wiring film,
- a step of forming a second metallic wiring film on the first metallic wiring film,
- a step of forming an organic insulating film in desired regions on the protective film and the second metallic wiring film, and
- a step of forming a metallic wiring pattern on the organic insulating film and the second metallic wiring film.
A process for producing an electronic part, which comprises:
- a step of providing a main substrate through which sintered metallizings are provided from the front side to the back side,
- a step of forming pads for wiring extension at positions of the sintered metallizings on the front side of the main substrate,
- a step of forming a first metallic wiring film on the pads for wiring extension,
- a step of forming a protective film in desired regions on the main substrate and the first metallic wiring film,
- a step of forming a second metallic wiring film on the first metallic wiring film,
- a step of releasing the protective film,
- a step of forming an organic insulating film on the protective film and the second metallic wiring film,
- a step of forming second contact holes in the organic insulating film on the second metallic wiring film, and
- a step of forming a metallic wiring pattern on the organic insulating film and the second metallic wiring film.
An electronic part, which comprises:
- a main substrate through which sintered metallizings are provided from the front side to the back side,
- pads for wiring extension, formed on the main substrate and connected each to the sintered metallizings in the main substrate,
- a first metallic wiring film formed on the pads for wiring extension,
- a first organic insulating film formed on the main substrate,
- first contact holes formed in the first organic insulating film and on the first metallic wiring film,
- a second metallic wiring film of different material from that of the first metallic wiring film, formed on the first metallic wiring film,
- a second organic insulating film formed on the first organic insulating film and the second metallic wiring film,
- second contact holes formed in the second organic insulating film and on the second metallic wiring film, and
- a metallic wiring pattern formed on the second organic insulating film and the second metallic wiring film.
Dependencies are inferred from the claim text.