Pressure sensor
AssigneeRobert Bosch GmbH
InventorsKurt Weiblen, Werner Herden, Uwe Lipphardt, Horst Muenzel, Matthias Kuesell, Steffen Schmidt
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AssigneeRobert Bosch GmbH
InventorsKurt Weiblen, Werner Herden, Uwe Lipphardt, Horst Muenzel, Matthias Kuesell, Steffen Schmidt
Estimating the term…
In a pressure sensor, a force is transferred via a pressure plunger end made of relatively hard material onto a measurement element including a sensor membrane on a support. The sensor membrane is part of a micromechanical arrangement made of silicon. A metal structure made of a metal of lower hardness compared with the hardness of the material of the pressure plunger end is applied onto the sensor membrane. This metal structure can be impressed and plastically deformed with increased force by the contact surface of the pressure plunger end, in such a way that conforming contact of the contact surface is achieved, and potential angular errors are compensated for.
A pressure sensor for detecting pressure in the combustion chamber of an internal combustion engine, the pressure sensor comprising:
A pressure sensor for detecting pressure in the combustion chamber of an internal combustion engine, the pressure sensor comprising:
A pressure sensor for detecting pressure in the combustion chamber of an internal combustion engine, the pressure sensor comprising:
Dependencies are inferred from the claim text.