Process for the separation of a gaseous hydride or a mixture of gaseous hydrides with the aid of a membrane
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsPascal Bouard, Philippe Labrune, Alain Villermet, Michel Gastiger
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Abstract
The invention relates to a process for the separation of a gaseous hydride or a mixture of gaseous hydrides from a gaseous medium containing at least one gas from the group consisting of H.sub.2, Ar, He, according to which the gaseous medium is passed on to a membrane module so that the concentration of the hydride or of the mixture of hydrides obtained at the outlet of the module is higher than their initial concentration in the gaseous medium.
Claims19
Process for separating a gaseous hydride or a mixture of gaseous hydrides from a gaseous medium comprising introducing a first gaseous medium, said first gaseous medium comprising (1) a gaseous hydride or a mixture of gaseous hydrides and (2) H.sub.2, Ar and/or He, into a membrane module;
- separating at least a portion of said hydride or said mixture of hydrides from said first gaseous medium in said membrane module to form a second gaseous medium having a hydride concentration which is higher than the initial hydride concentration in the first gaseous medium;
- removing said second gaseous medium from said membrane module;
- and removing remaining gas from said membrane module, said process excluding separation of silane from hydrogen gas alone.
Process for separating a gaseous silane or a mixture of gaseous silanes from a gaseous medium comprising introducing a first gaseous medium, said first gaseous medium comprising (1) a gaseous silane or a mixture of gaseous silanes and (2) Ar and/or He, into a membrane module;
- separating at least a portion of said silane or said mixture of silanes from said first gaseous medium in said membrane module to form a second gaseous medium having a silane concentration which is higher than the initial silane concentration in the first gaseous medium;
- removing said second gaseous medium from said membrane module;
- and removing remaining gas from said membrane module.
Process for separating a gaseous hydride or a mixture of gaseous hydrides from a gaseous medium comprising introducing a first gaseous medium, said first gaseous medium comprising (1) a gaseous hydride or mixture of gaseous hydrides, said hydride or hydrides excluding silane and (2) H.sub.2, Ar and/or He, into a membrane module;
- separating at least a portion of said hydride or said mixture of hydrides from said first gaseous medium in said membrane module to form a second gaseous medium having a hydride concentration which is higher than the initial hydride concentration in the first gaseous medium;
- removing said second gaseous medium from said membrane module;
- and removing remaining gas from said membrane module.
Dependencies are inferred from the claim text.