Integrated optical modulator and waveguide and method
AssigneeTexas Instruments Incorporated
InventorGregory A. Magel
Life of this patent
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Abstract
An optical waveguide (20) is comprised of a core layer (20) fabricated on an interference layer (18). The interference layer (18) is supported by a lower cladding layer (16) deposited on a semiconductor substrate (12), a and Light travels through the core layer and is coupled into the interference layer by a grating. An electronic element in the interference layer modulates the light passing through the interference layer. The modulated light is then coupled back into the core layer by either another portion of the grating, or a separate grating.
Claims19
An optical modulator comprising:
- a. a substrate;
- b. a lower cladding layer upon said substrate;
- c. an interference layer upon said lower cladding layer;
- d. a core layer upon said interference layer;
- e. at least one grating in said modulator operable to couple light between said core layer and said interference layer;
- and
- f. an electrical element to modulate light in said interference layer.
A method for forming an optical modulator comprising:
- a. preparing a semiconductor substrate;
- b. building a lower cladding layer upon said substrate;
- c. depositing an interference layer upon said lower cladding layer;
- d. depositing a core layer upon said interference layer;
- e. forming gratings in said modulator operable to couple light between said core layer and said interference layer;
- and
- f. forming an electronic element in said modulator to modulate light in said interference layer.
An optical modulator comprising:
- a. a silicon substrate;
- b. a silicon dioxide lower cladding layer supported by said substrate;
- c. an interference layer supported by said lower cladding layer;
- d. a core layer for guiding light, said core layer supported by said interference layer and at least twice as thick as said lower cladding layer;
- e. a first grating for coupling light from said core layer to said interference layer;
- f. a second grating for coupling light from said interference layer to said core layer;
- and
- g. a means fur modulating light in said interference layer.
Dependencies are inferred from the claim text.