Microwave plasma reactor
AssigneeApplied Science and Technology, Inc.
InventorsMatthew M. Besen, Evelio Sevillano, Donald K. Smith
Life of this patent
Estimating the term…
Abstract
A microwave plasma reactor including a chamber for containing a gas to be energized into a plasma with microwave energy, an electrode having two surfaces in the chamber for radiating microwave energy from one of the surfaces into the chamber to form the plasma proximate the radiating surface, and a waveguide or coaxial conductor for introducing microwave energy onto the other of the two electrode surfaces for providing the energy to form the plasma.
Claims41
A microwave plasma reactor, comprising:
- a chamber for containing a gas to be energized into a plasma with microwave energy;
- a cavity for containing a microwave field to create the gas plasma;
- an electrode having two surfaces and located in said cavity for radiating microwave energy from one of its surfaces to form the plasma proximate said electrode radiating surface;
- and
- means for introducing microwave energy onto the other of the two electrode surfaces, said microwave energy passing around the other of the two electrode surfaces and proximate said electrode radiating surface for creating a microwave discharge to form the plasma.
A microwave plasma reactor, comprising:
- a chamber for containing a gas to be energized into a plasma with microwave energy;
- a cavity for containing a microwave field to create the gas plasma;
- an electrode having two surfaces and located in said cavity for radiating microwave energy from one of its surfaces to form the plasma proximate said electrode radiating surface;
- means introducing microwave energy onto the other of the two electrode surfaces for providing the energy to form the plasma;
- and
- means for cooling the electrode.
A microwave plasma reactor, comprising:
- a chamber for containing a gas to be energized into a plasma with microwave energy;
- a cavity for containing a microwave field to create the gas plasma;
- an electrode having two surfaces and located in said cavity for radiating microwave energy from one of its surfaces to form the plasma proximate said electrode radiating surface;
- means for introducing microwave energy onto the other of the two electrode surfaces for providing the energy to form the plasma;
- means for creating a relatively thin, elongated plasma proximate said electrode radiating surface, said means including an uneven spacing between said electrode radiating surface and said chamber.
A microwave plasma reactor, comprising:
- a chamber for containing a gas to be energized into a plasma with microwave energy;
- a cavity for containing a microwave field to create the gas plasma;
- an electrode having two surfaces and located in said cavity for radiating microwave energy from one of its surfaces to form the plasma proximate said electrode radiating surface;
- means for introducing microwave energy onto the other of the two electrode surfaces for providing the energy to form the plasma;
- dielectric seal means for sealing the chamber from atmosphere and allowing microwave energy to pass therethrough;
- and
- spring means mechanically coupled to the electrode for urging said electrode against said dielectric seal means.
Dependencies are inferred from the claim text.