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US 5,501,637 AGranted
Temperature sensor and method
AssigneeTexas Instruments Incorporated
InventorsWalter M. Duncan, Francis G. Celii, Steven A. Henck, Ajit P. Paranjpe, Douglas L. Mahlum, Larry A. Taylor
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Abstract
A direct, noncontact temperature sensor includes an ellipsometer (104-106) to determine absorptance for layered structures and a pyrometer (102) to determine emissive power and combines the two measurements to determine temperature.
Claims15
A temperature sensor for a layered structure, comprising:
- a pyrometer;
- and
- an absorptance detector coupled to said pyrometer, said detector determining emissivity of a layered structure based on layer thickness measurements;
- wherein said absorptance detector provides an emissivity correction for said layered structure to said pyrometer.
1 more element
A temperature sensor, comprising:
- a pyrometer with a passband filter centered at wavelength .lambda..sub.0 ;
- an ellipsometer with detection bands centered at wavelengths .lambda..sub.1, .lambda..sub.2, . . . .lambda..sub.N, with N.gtoreq.2;
- and
- a controller with inputs coupled to outputs of said pyrometer and said ellipsometer and outputting a temperature, said controller programmable to compute absorptance based on layer thickness measurement outputs of said ellipsometer and apply the absorptance as a correction to the output of said pyrometer.
1 more element
A method of temperature sensing of a non-metal layered structure, comprising the steps off:
- determining the absorptance of a non-metal layered structure by ellipsometry based on layer thickness measurements with said non-metal layered structure including at a surface at least one layer of known materials;
- determining an emissive power at said surface of said non-metal layered structure by pyrometry;
- and
- computing the temperature from said emissive power and said absorptance.
1 more element
Dependencies are inferred from the claim text.