Pneumatically driven micro-pump

Pneumatically driven micro-pump comprising

• channel means including a first port, a second port and a flow-through space which provides a communication therebetween;
• a plurality of diaphragms disposed in an array along the flow-through space in a direction from the first to the second port and each having its front surface exposed to the flow-through space and capable of bulging/retracting with respect to the space;
• diaphragm support means disposed on the opposite side of the diaphragms from the flow-through space and including a plurality of actuating gas spaces which are disposed in opposing relationship with the rear surfaces of the respective diaphragms;
• an elastic thin film for individually imparting an oscillation of pneumatic pressure to each of the actuating gas spaces;
• a plurality of solenoids individually associated with each of the actuating gas spaces and each including a plunger disposed for abutment against the elastic thin film and an electrical coil for driving the plunger to project to induce the oscillation of pneumatic pressure;
• a plurality of solenoid drivers for individually energizing the solenoids;
• and energization control means for applying energizing signals to the plurality of solenoid drivers with phase differences therebetween such that the plungers of the plurality of solenoids reach their respective upper dead center where a high pressure peak is imparted to the associated actuating gas space in a sequence which shifts in a direction from the first to the second port.

Pneumatically driven micro-pump comprising

• channel means including a first port, a second port and a flow-through space providing a communication therebetween;
• a plurality of diaphragms disposed in an array along the flow-through space in a direction from the first to the second port and each having its front surface exposed to the flow-through space and capable of bulging/retracting with respect to the space;
• diaphragm support means disposed on the opposite side of the diaphragms from the flow-through space and including a plurality of actuating gas spaces which are disposed in opposing relationship with the rear surfaces of the respective diaphragms;
• a magnetic body received in each space communicating with the respective actuating gas spaces so as to be movable in a direction toward and away from the actuating gas spaces;
• a plurality of magnetic drive means each including an electrical coil for driving the magnetic body in a direction to reduce the volume of the space communicating with the respective actuating gas space and a magnet driving the magnetic body in the opposite direction;
• a plurality of solenoid drivers for individually energizing the electrical coils;
• and energization control means for applying energizing signals to the plurality of solenoid drivers with phase differences therebetween such that the magnetic body driven by the respective electrical coils of the plurality of magnetic drive means reaches an upper dead center where a high pressure peak is imparted to the associated actuating gas space in a sequence which shifts in a direction from the first to the second port.

Pneumatically driven micro-pump comprising

• channel means including a first port, a second port and a flow-through space providing a communication therebetween;
• a plurality of diaphragms disposed in an array along the flow-through space in a direction from the first to the second port and each having its front surface exposed to the flow-through space and capable of bulging/retracting with respect to the space;
• diaphragm support means disposed on the opposite side of the diaphragms from the flow-through space and including a plurality of actuating gas spaces which are disposed in opposing relationship with the rear surfaces of the respective diaphragms;
• an elastic thin film for individually imparting an oscillation of pneumatic pressure to each of the actuating gas spaces;
• a plurality of cam/rod assemblies individually associated with the actuating gas spaces and each including a rod disposed for abutment against the elastic thin film and a cam which drives the rod to project to produce an oscillation of pneumatic pressure;
• and a rotary shaft on which the cams are fixedly mounted and an electric motor for driving the rotary shaft for rotation, the cams being mounted on the rotary shaft with angular differences therebetween such that the rod which reaches an upper dead center where a high pressure peak is imparted to an associated actuating gas space sequentially shifts in a direction from the first to the second port.