US 5,497,407 AGranted

Contaminating-element analyzing method

AssigneeKabushiki Kaisha Toshiba

InventorsFumio Komatsu, Kunihiro Miyazaki, Ayako Shimazaki

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Abstract

A contaminating-element analyzing method enables precise identification of contaminating elements and precise calculation of concentrations thereof by eliminating a broad peak waveform due to Rayleigh scattering and Compton scattering and a background waveform from a measured waveform of a contaminated sample. A blank sample or samples are irradiated by an X-ray beam under a constant condition to obtain a plurality of measured waveforms of fluorescent X-rays, and the plurality of measured waveforms are averaged to obtain a blank waveform. Then a contaminated sample is irradiated by the X-ray beam under the same condition as that for the blank sample to obtain a measured waveform of fluorescent X-rays. The blank waveform is subtracted from the measured waveform of contaminated sample, and then the contaminating elements are identified and the concentrations thereof are calculated on the basis of the waveform data after the subtraction process.

Claims5

Dependent claims

A contaminating-element analyzing method, comprising the steps of:

irradiating a blank sample plural times with an X-ray beam under a constant condition;
detecting, after each irradiation of the blank sample has terminated, a measured spectrum of fluorescent X-rays having broad scattering peaks caused by Rayleigh scattering and Compton scattering;
averaging plural measured spectra of fluorescent X-rays to obtain a blank spectrum;
irradiating a contaminated sample with the X-ray beam under the same condition as that for the blank sample;
detecting, after irradiation of the contaminated sample has terminated, a measured spectrum of fluorescent X-rays having broad scattering peaks caused by Rayleigh scattering and Compton scattering;
subtracting said blank spectrum from said measured spectrum of the contaminated sample so as to eliminate the broad scattering peaks;
and
identifying a contaminating element and obtaining the concentration thereof, on the basis of the spectrum data obtained at said subtracting step.

5 more elements

Dependencies are inferred from the claim text.