Method of making junction-isolated high voltage MOS integrated device
AssigneeSGS-Thomson Microelectronics S.A.
InventorsEnrico M. A. Ravanelli, Flavio Villa
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Abstract
An integrated device includes isolating regions of a first type of conductivity, each surrounding an epitaxial pocket of an opposite type of conductivity, and housing drain and source regions, and covered with an oxide layer housing gate regions and over which extend the source, drain and gate connections. For linearizing potential distribution at the epitaxial pocket--isolating region junction and close to the source regions beneath the connections, these regions are provided with a double chain of condensers embedded in the oxide layer and the terminal elements and the intermediate element of which are biased to predetermined potentials.
Claims2
A method of producing a junction-isolated integrated device comprising the steps of:
- providing at least one epitaxial pocket of a first conductivity type;
- defining source and drain regions within the at least one epitaxial pocket;
- substantially surrounding the at least one epitaxial pocket with at least one isolating region of a second conductivity type;
- substantially covering the at least one epitaxial pocket with at least one layer of electrically insulating material;
- providing at least one electrically conductive connection on the at least one layer of electrically insulating material;
- embedding a first chain of capacitors in the at least one layer of electrically insulating material;
- and
- biasing first terminal elements, coupled to the first chain of capacitors, to predetermined voltage potentials.
Dependencies are inferred from the claim text.