Annealing process to improve optical properties of thin film light emitter
AssigneeTexas Instruments Incorporated
InventorsChih-Chen Cho, Walter M. Duncan
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Abstract
This invention discloses a method to improve significantly the optical properties of rare-earth doped MBE-grown CaF.sub.2 films by annealing such films in a reducing atmosphere (e.g. forming gas) at appropriate temperatures (generally greater than 600 C. Films grown at the same temperature as that used later in the novel annealing process do not exhibit the same PL spectrum nor the high photoluminescence intensity emissions as annealed films. The intensity of the strongest peak 12a in FIG. 2 has a magnitude 3.6 times the intensity than the strongest peak 12 in as-grown film in FIG. 1. Similarly these same films annealed in an oxygen environment do not exhibit the have the desired properties.
Claims14
A method of making a Nd or Er doped calcium fluoride thin film laser, said method comprising:
- a. forming a film of doped calcium fluoride over a silicon substrate;
- and
- b. annealing said film and substrate in a reducing atmosphere at a temperature of at least 600.degree. C.
A method of making a Nd doped calcium fluoride thin film emitter, said method comprising:
- a. epitaxially growing an aluminum layer directly on a single-crystal silicon substrate;
- b. epitaxially growing a film of Nd doped calcium fluoride over said aluminum layer;
- and
- c. annealing said film and substrate in an atmosphere consisting essentially of 90% nitrogen and 10% hydrogen, and at a temperature of 600.degree.-700.degree. C. for 10-120 minutes.
A method of making a Er doped calcium fluoride thin film emitter, said method comprising:
- a. epitaxially growing an aluminum layer directly on a single-crystal silicon substrate;
- b. epitaxially growing a film of Er doped calcium fluoride over said aluminium layer;
- and
- c. annealling said film and substrate in an atmosphere of consisting essentially of 90% nitrogen and 10% hydrogen, and at a temperature of 600.degree.-700.degree. C. for 10-120 minutes.
Dependencies are inferred from the claim text.