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US 5,494,711 AGranted
Method of preparing InSb thin film
AssigneeMurata Manufacturing Co., Ltd.
InventorsToshikazu Takeda, Yoshifumi Ogiso, Takuji Nakagawa, Atsuo Senda
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Abstract
Disclosed herein is a method of preparing an InSb thin film, which comprises a step of physically sticking InSb powder onto a major surface of a substrate, and a step of depositing an InSb thin film on the major surface of the substrate provided with the as-stuck InSb powder by a method such as vacuum evaporation.
Claims20
A method of preparing an InSb thin film, comprising the steps of:
- physically sticking InSb powder onto a major surface of a substrate so as to incompletely cover said surface;
- and
- depositing an InSb thin film on said major surface of said substrate.
Dependencies are inferred from the claim text.