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US 5,494,698 AGranted
Teflon filled resinoid dicing blades for fabricating silicon die modules
AssigneeXerox Corporation
InventorsRobert M. White, Lawrence H. Herko, Robert P. Altavela
Life of this patent
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Abstract
A resinoid dicing blade having approximately a 20% by volume porosity structure is coated and impregnated with Teflon.RTM. by a process which impregnates the resinoid blade with Teflon.RTM. to about 0.3 to 0.5% by weight. The Teflon.RTM. impregnated dicing blades not only reduces nozzle chipping when bonded silicon wafers are separated into a plurality of individual printhead die, but blade life is significantly increased.
Claims3
A method of producing a Teflon.RTM. filled resinoid dicing blade, comprising the steps of:
- (a) preparing a Teflon.RTM. solution of solvent of a perfluorooctane and soluble amorphous polytetrafluoroethylene having 2% amorphous polytetrafluoroethylene by weight in a container;
- (b) immersing a plurality of resinoid dicing blades in the Teflon.RTM. solution in the container, the resinoid blades having exposed pores and a porosity of about 20% by volume;
- (c) placing the container with the Teflon.RTM. solution and resinoid blades immersed therein in a vacuum chamber;
- (d) drawing a vacuum in the vacuum chamber and maintaining the vacuum in the vacuum chamber until substantially all air is removed from the exposed pores of the resinoid blade;
- (e) returning the vacuum chamber to atmospheric pressure so that all exposed pores of the resinoid blade are filled with the Teflon.RTM. solution;
- (f) removing the container from the vacuum chamber and removing the resinoid blades from the Teflon.RTM. solution;
- (g) draining the excess Teflon.RTM. solution from the resinoid blades;
- and
- (h) evaporating the solvent from the Teflon.RTM. solution on the resinoid blade pores, thereby filling the resinoid blade pores with solid amorphous polytetrafluoroethylene.
6 more elements
Dependencies are inferred from the claim text.