Process for producing vibrator for piezoelectric motor

A process for producing a vibrator for a piezoelectric motor which is made of a piezoelectric element and an elastic body, which displaces the elastic body by applying voltage to a plurality of electrode patterns disposed on the piezoelectric element, and which thus rotates a rotatable body that is in contact with the elastic body, the process comprising the step of:

• forming in a shape an elastic material which can be elastically deformed;
• forming a piezoelectric material on the elastic material for polarization and for driving;
• forming an electrode for polarization on the piezoelectric material;
• forming an electrode for driving on the surface of the electrode for polarization, or forming an electrode for driving after stripping the electrode for polarization from the piezoelectric material;
• and
• etching for forming the elastic material in a shape of the elastic body and for removing the elastic body from a base.

In a process for producing a vibrator for a piezoelectric motor which is made of a piezoelectric element and an elastic body, which displaces the elastic body by applying voltage to a plurality of electrode patterns disposed on the piezoelectric element, and which thus rotates a rotatable body that is in contact with the elastic body, the improvement comprising the steps of:

• forming an elastic material into a shape which can be elastically deformed;
• etching the shaped elastic material to form the elastic body;
• and
• attaching the piezoelectric element to the elastic body with adhesive.