Electrical access for electrical lapping guides
AssigneeQuantum Corporation
InventorsDavid J. Dupuis, David J. Kindler, Alan B. Smith
Life of this patent
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Abstract
The invention provides a new method and apparatus for electrically accessing a lapping sensor positioned along a row of slider sites on a wafer. The apparatus for accessing the lapping sensor may be positioned outside of the boundaries of the slider sites. The apparatus may also provide top conductors electrically connecting target pads to contact pads. The process for lapping rows of slider sites includes coupling a measurement device to a target pad, coupling a lapping sensor to the top conductor, and lapping the row until the measurement device detects a predetermined signal from the lapping sensor.
Claims2
A process for lapping rows of slider sites on a substrate comprising the steps of:
- A. providing a substrate having a plurality of terminal pads, a top conductor and rows of slider sites, the outer row being the row farthest from the terminal pads, each row having a lapping sensor, the top conductor extending from the terminal pads to a region in each row, the region in each row being adjacent to the lapping sensor in the row;
- B. electrically coupling a measurement device to the terminal pads;
- C. electrically coupling the lapping sensor in the outer row to the top conductor effective to electronically couple the measurement device to the lapping sensor in the outer row;
- D. initiating the lapping of the outer row;
- E. monitoring the lapping sensor in the outer row with the measurement device;
- and
- F. halting the lapping of the outer row when the measurement device detects a predetermined signal from the lapping sensor in the outer row
- G. removing the outer row from the substrate and, if the removed row was not the last on the substrate, exposing a new outer row;
- H. repeating steps C through G until each row has been lapped and removed from the substrate.
Dependencies are inferred from the claim text.