Gas sensor
AssigneeFigaro Engineering Inc.
InventorsTooru Nomura, Yoshinobu Matsuura, Tomohiro Inoue
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Abstract
An alumina substrate has a front surface with a semiconductor gas sensor main body attached thereon for specific detection of a surface exposed gas, and has a rear surface formed with a glass layer and a gold paste layer as superposed on the surface, and bonded to a gold plating layer on a frame by parallel gap welding. The gold paste layer is welded to the gold plating layer with the heat of welding. The glass layer prevents transmission of thermal impact of die bonding to the substrate.
Claims7
A semiconductor gas sensor for detecting the presence of a specific gas in a gaseous mixture comprising a sensor main body formed on on the front surface of an insulating substrate having a front surface and a rear surface, the insulating substrate has a rear surface oriented for interface bonding to a frame, where the gas sensor being characterized in that a metal layer is formed over the rear surface of the insulating substrate and heat welded to the frame for die bonding adhesion between the insulating substrate and frame, thereby fastening the insulating substrate to the frame.
Dependencies are inferred from the claim text.