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US 5,493,400 AGranted
Arrangement for projecting a test pattern onto a surface to be investigated
AssigneeCarl Zeiss Jena GmbH
InventorsBernhard Grobler, Hartmut Heinz, Peter Huttel, Gunter Schoppe
Life of this patent
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Abstract
An arrangement generates a projection beam path on the projection objective outside of the optical axis. This is achieved by mounting an optically transparent wedge forward or rearward of the test pattern. The wedge can be rotated with respect to its orientation by 180.degree..
Claims12
An arrangement for projecting a test pattern onto a surface to be investigated, the arrangement comprising:
- a light source for supplying a light beam;
- optical means for defining a central optical axis and providing a beam path for said light beam from said light source to said surface;
- test pattern means arranged in said beam path for defining a test pattern to be projected onto said surface;
- and,
- transparent optical wedge means associated with said test pattern means for shifting said beam off center away from said optical axis thereby causing said beam path to impinge on said surface at an angle not equal to 90.degree. relative to said surface.
2 more elements
Dependencies are inferred from the claim text.