Multi-coordinate measuring system using a cross grating to create a plurality of diffraction beams emanating from two or more coordinate directions

A method for measuring along multi-coordinates comprising the steps of:

• diffracting light emitted by a light source into at least a first, second, third and fourth partial beam bundles;
• the first, second, third and fourth partial beam bundles being directed in different coordinate directions;
• coupling the first, second, third and fourth partial beam bundles into first, second, third and fourth strip waveguides using a coupling element formed by two curved grids, said coupling element communicating with said first, second, third and fourth waveguides located on a substrate;
• bringing the first and second partial beam bundles into interference;
• bringing the third and fourth partial beam bundles into interference;
• and
• detecting the interference of the first and second partial beam bundles and the third and fourth partial beam bundles.

A multi-coordinate measuring system comprising:

• a diffraction element that receives light emitted by a light source and diffracts said light into at least a first, second, third and fourth partial beam bundles;
• the first, second, third and fourth partial beam bundles being directed in different coordinate directions;
• a substrate;
• a first strip waveguide located on the substrate;
• a second strip waveguide located on the substrate;
• a third strip waveguide located on the substrate;
• a fourth strip waveguide located on the substrate;
• a coupling element located on the substrate that directs the first, second, third and fourth partial beam bundles into the first, second, third and fourth strip waveguides respectively, said coupling element formed by at least two curved grids;
• a first coupler communicating with said first and second strip waveguides and brings the first and second partial beam bundles into interference;
• a second coupler communicating with said first and second strip waveguides brings the third and fourth partial beam bundles into interference;
• and
• a detector system that detects the interference of the first and second partial beam bundles and the third and fourth partial beam bundles.