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US 5,493,156 AGranted
Equipment using a micro-actuator
AssigneeNEC Corporation
InventorHiroyuki Okada
Life of this patent
Estimating the term…
Abstract
A micro electro mechanical device has at least two layers of substrates. In a first layer, a micro-actuator is formed, and in a second layer facing to the first layer, a passive movable unit is formed. Rotation of the rotor unit of the micro-actuator is coupled to the movable unit on the second layer by suitable engaging means.
Claims3
An equipment using a micro-actuator comprising:
- a substrate;
- a rotor unit provided on said substrate so as to freely rotate, said rotor unit having at least one projection;
- and
- a movable part having at least one opening, said movable part being provided above said rotor unit, said at least one projection of said rotor unit engaging in said at least one opening of said movable part to transmit rotation of said rotor unit to said movable part.
1 more element
Dependencies are inferred from the claim text.