Surface defect inspection system and method

An inspection system for inspecting a surface of an object, said system comprising:

• an enclosed chamber:
• illuminating means within said enclosed chamber for providing ultraviolet radiation within said enclosed chamber during an inspection period suitable for detecting defects substantially only at said surface of said object;
• positioning means for positioning said object within said enclosed chamber for inspection and for removing said object from said enclosed chamber after inspection, said positioning means positioning said object for inspection within said enclosed chamber so that all areas of said surface to be inspected are completely illuminated by said ultraviolet radiation from said illuminating means during the entirety of said inspection period whereby defects at each said area said illuminated surface will cause scattering of said ultraviolet radiation during said inspection period;
• detection means within said enclosed chamber for sensing said ultraviolet radiation scattered at each of said areas of said illuminated surface during said inspection period due to defects that are within a predetermined size range and providing an output indicative of each sensed defect;
• and
• processing means for receiving said output from said detecting means and, responsive thereto, providing an output indicative of each defect sensed at said areas of said surface of said object that is within said predetermined size range.

An inspection system for inspecting the front surface of a sheet of flat panel glass for defects, said system comprising:

• an enclosed chamber;
• illuminating means within said enclosed chamber for providing ultraviolet radiation within said enclosed chamber during an inspection period;
• positioning means for positioning said glass sheet within said enclosed chamber for inspection and for removing said glass sheet from said enclosed chamber after inspection, said positioning means positioning said glass sheet for inspection within said enclosed chamber with said front surface to be inspected facing said illuminating means so that all areas of said front surface to be inspected are completely illuminated by said ultraviolet radiation from said illuminating means during the entirety of said inspection period whereby defects at each said area of said illuminated front surface will cause scattering of said ultraviolet radiation during said inspection period;
• ultraviolet radiation dark field imaging means within said enclosed chamber for collecting ultraviolet radiation scattered at each said area of said illuminated front surface of said glass sheet within said enclosed chamber during said inspection period;
• detecting means within said enclosed chamber including a charge coupled device for receiving said scattered ultraviolet radiation collected by said imaging means and providing an output indicative of each defect sensed over the entirety of said front surface that is within a predetermined size range;
• and
• processing means for receiving said output from said charge coupled device and, responsive thereto, providing an output indicative of each defect sensed at said areas of said front surface of said glass sheet that is within said predetermined size range.

A method for detecting defects at a surface of a glass sheet, said method comprising:

• providing ultraviolet radiation to all areas of said surface to be inspected for defects during the entirety of a predetermined inspection period whereby defects at each said area of said illuminated surface causes scattering of said ultraviolet radiation during said inspection period;
• separately simultaneously detecting ultraviolet radiation scattered at said areas of said illuminated surface due to defects within a predetermined size range sensed at said areas;
• and
• using said detected ultraviolet radiation to provide an output indicative of each defect sensed at said areas of said surface that is within said predetermined size range.