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US 5,492,770 AGranted
Method and apparatus for vapor deposition of diamond film
AssigneeFujitsu Limited
InventorsMotonobu Kawarada, Kazuaki Kurihara
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Abstract
A diamond film is formed on a surface of a substrate. The diamond film is attached securely to the substrate by forming a first layer on the surface comprising a mixture of a main component of the substrate and a sintering reinforcement agent for diamond, then forming a second layer comprising a mixture of said agent and diamond on said first layer, and finally forming the diamond film on the second layer.
Claims4
An article of manufacture comprising:
- a metallic substrate;
- and
- a diamond film formed on said substrate by chemical vapor deposition,
- said film including a mixed phase comprising a copper or gold component bonded with the diamond of said film.
1 more element
An article of manufacture comprising:
- a substrate comprising a main component;
- a first layer on said substrate comprising a mixture of said main component and a sintering reinforcement agent for diamond;
- a second layer on said first layer comprising a mixture of said agent and diamond;
- and
- a diamond film on said second layer.
2 more elements
Dependencies are inferred from the claim text.