Method for fabricating spacer support structures useful in flat panel displays
AssigneeMicron Technology, Inc.
InventorAngus C. Fox, III
Life of this patent
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Abstract
A method is provided for forming inter-electrode spacers useful in flat panel display devices which comprises placing a mold on a first electrode plate. The mold has openings with corresponding diameters. The mold is coated with a conformal film which lines the openings, thereby decreasing the diameters of the openings. The openings are filled with a glass material. The conformal film is selectively removed, and the mold is separated from the electrode.
Claims20
A method for fabricating columnar supports used for an evacuated display, said method comprising the following steps:
- providing a laminate, said laminate having upper and lower major surfaces;
- punching a plurality of holes through said laminate, each of said holes being disposed normal to said major surfaces of said laminate, each of said holes having a diameter;
- disposing a sacrificial layer about said laminate which conformally coats said major surfaces and substantially all of said holes, thereby reducing said diameter of said holes;
- filling said holes with a dielectric material, thereby forming the columnar supports,
- etching at least a portion of said sacrificial layer from said lower major surface, thereby exposing at least a portion of the columnar supports;
- disposing a high-temperature adhesive to said exposed portions of the columnar supports;
- aligning and affixing said exposed portion of the columnar supports to a location on a baseplate;
- substantially removing said sacrificial layer;
- and
- removing said laminate, thereby exposing the columnar supports.
A method of forming inter-electrode spacers useful for flat panel display devices, said method comprising the following steps of:
- placing a mold on a first electrode plate, said mold having openings with corresponding diameters;
- coating said mold with a film, said film lining said openings, thereby decreasing said diameters of said openings;
- filling said openings with a silicate material;
- selectively removing said film;
- and
- removing said template from said electrode plate.
A process for the formation of inter-electrode support structures, said process comprising the following steps of:
- depositing a conformal film over a template, said template having openings;
- filling said openings of said template with a support material, said support material being selectively etchable with respect to said conformal film;
- etching said conformal film;
- and
- removing said template from said support material, thereby exposing said inter-electrode support structures.
Dependencies are inferred from the claim text.