Charged particle detection device and charged particle radiation apparatus

A charged particle detection device comprising:

• a semiconductor substrate having a hole for causing charged particles to pass therethrough;
• a first insulating film formed on said semiconductor substrate;
• an electrode formed on said first insulating film;
• means for forming a potential well, which is constituted by a depletion layer in a first region of said semiconductor substrate, near a surface of said semiconductor substrate under said electrode;
• means for sweeping, into a second region of said semiconductor substrate, charges which are generated in said semiconductor substrate by charged particles incident through said electrode and that are stored in said potential well;
• means for detecting electrical signals generated by the charged particles swept into said second region of said semiconductor substrate;
• and
• a conductive thin film formed on an inner wall of said hole through a second insulating film and electrically connected to said electrode.

A charged particle radiation apparatus comprising:

• a radiation device for radiating charged particles onto a sample;
• and
• a charged particle detection unit for detecting charged particles reflected by said sample,
• said charged particle detection comprising;
• a semiconductor substrate,
• an insulating film formed on said semiconductor substrate,
• an electrode formed on said insulating film,
• means for forming a potential well, which is constituted by a depletion layer in a first region of said semiconductor substrate, near a surface of said semiconductor substrate under said electrode,
• means for sweeping, into a second region of said semiconductor substrate, charges which are generated in said semiconductor substrate by charged particles incident from said electrode and that are stored in said potential well, and
• means for detecting electrical signals generated by the charged particles swept into said second region of said semiconductor substrate.

A charged particle detection device comprising:

• a semiconductor substrate;
• an insulating film formed on said semiconductor substrate;
• an electrode formed on said insulating film;
• means for forming a potential well, which is constituted by a depletion layer in a first region of said semiconductor substrate, near a surface of said semiconductor substrate under said electrode, by applying a first voltage to said electrode;
• means for sweeping, into a second region of said semiconductor substrate, charges which are generated in said semiconductor substrate by electrons incident from said electrode and that are stored in said potential well, by applying a second voltage that is lower than said first voltage to said electrode;
• and
• means for detecting electrical signals generated by the electrons swept into said second region of said semiconductor substrate.