High resolution imaging and measuring dynamic surface effects of substrate surfaces
OwnerRichard Spitzerinventor
Life of this patent
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Abstract
Methods of high resolution imaging and measuring dynamic surface effects of substrate surfaces is provided. The present invention utilizes electronic scanning with multiple scanning tunneling microscope (STM) tunnel-effect probes on an array that is stationary relative to the substrate surface. A high resolution image of the substrate surface is obtained by positioning an array of STM probes stationary relative to the substrate surface during the scanning process, selecting spatial points at which probes of the array of STM probes are to be activated, selecting times at which the selected STM probes are to be activated, activating the selected STM probes at the selected times, and measuring tunneling currents between the selected STM probes and the substrate.
Claims11
A method of obtaining a high resolution image of a substrate surface comprising the steps of:
- (a) positioning an array of STM probes such that said array of STM probes is stationary relative to said substrate surface during activation of said array of STM probes to obtain said image;
- (b) electing-spatial points at which probes of said array of STM probes are to be activated;
- (c) selecting times at which said selected STM probes are to be activated;
- (d) activating said selected STM probes at said selected times;
- and
- (e) measuring tunneling currents between said selected STM probes and said substrate.
A method of measuring dynamic substrate surface effects comprising the steps of:
- (a) positioning an array of STM probes such that said array of STM probes is stationary relative to said substrate surface during activation of said array of STM probes;
- (b) selecting spatial points at which probes of said array of STM probes are to be activated:
- (c) selecting times at which said selected STM probes are to be activated;
- (d) activating said selected STM probes at said selected times;
- (e) measuring tunneling currents between said selected STM probes and said substrate;
- (f) monitoring said dynamic effects over time by electronic polling of said selected STM probes over time;
- and
- (g) recording the measured response from said polling of STM probes.
Dependencies are inferred from the claim text.