Reactive multilayer synthesis of hard ceramic foils and films
AssigneeThe United States of America as represented by the Department of Energy
InventorsDaniel M. Makowiecki, Joseph B. Holt
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Abstract
A method for synthesizing hard ceramic materials such as carbides, borides nd aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coild as a tape for later use.
Claims18
A process for fabricating hard ceramic material, comprising:
- forming a multilayer structure of a plurality of alternating layers of a reactive metal and material selected from the group of carbon, boron, and aluminum;
- and
- reacting the thus formed multilayer structure to produce dense crystalline ceramic material.
A process for the fabrication of a hard ceramic material with a very small and uniform grain structure, comprising in combination:
- a magnetron deposition technique for producing a multilayer structure composed of a plurality of alternating layers of selected material;
- and
- a combustion synthesis technique for reacting the multilayer structure to produce a ceramic material having a small and uniform grain structure with a grain size in the range of 100-10,000.ANG..
Dependencies are inferred from the claim text.