Photomask or a light shielding member having a light transmitting portion and a light shielding portion
AssigneeCanon Kabushiki Kaisha
InventorsTakayuki Yagi, Toshiyuki Komatsu, Yasue Sato, Shinichi Kawate
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Abstract
A photomask or a light-shielding member has a support capable of transmitting light, a light-shielding pattern which shields the light and a light absorbing member provided corresponding to the light-shielding pattern. In one aspect, the light-shielding pattern and the light absorbing member are provided on the same side of the support. In another aspect, the light-shielding pattern and the light absorbing member are provided with the support sandwiched therebetween.
Claims19
A photomask having:
- a support capable of transmitting light,
- a light-shielding pattern which shields said light, and
- a light absorbing member provided corresponding to said light shielding pattern.
A photomask having a light transmitting portion and a light shielding portion, wherein a portion other than said light transmitting portion and said light shielding portion has a light transmittance between the light transmittances of said respective portions.
A light-shielding member having:
- a support capable of transmitting light;
- a light-shielding pattern which shields the light;
- and
- a light absorbing member provided corresponding to said light shielding pattern.
A light-shielding member comprising:
- a light transmitting portion;
- and
- a light-shielding portion,
- wherein a portion other than said light transmitting portion and said light-shielding portion has a light transmittance between the light transmittances of the respective portions.
A light-shielding mask comprising:
- a support capable of transmitting light;
- and
- a light-shielding pattern which shields the light, said light-shielding pattern comprising a metal layer and a light-absorbing layer corresponding to the metal layer.
Dependencies are inferred from the claim text.