Cleaning method using azeotropic mixtures of perfluoro-n-hexane with diisopropyl ether or isohexane and cleaning apparatus using same

A cleaning method including the steps of cleaning an article with a solvent, optionally purging or rinsing said article with a solvent, and cleaning and drying said article with solvent vapor, wherein the solvent in any one of the steps is the same as or different from the solvent in any or all of the other steps, and wherein the solvent in at least one of the steps is a mixed solvent composition consisting essentially of 70 to 85% by weight of perfluoro-n-hexane and 15 to 30% by weight of diisopropyl ether, said composition having an azeotropic boiling point of 47.degree. to 51.degree. C. at ambient pressure.

A cleaning method including the steps of cleaning an article with a solvent, optionally purging or rinsing said article with a solvent, and cleaning and drying said article with solvent vapor, wherein the solvent in any one of the steps is the same as or different from the solvent in any or all of the other steps, and wherein the solvent in at least one of the steps is a mixed solvent composition consisting essentially of 60-70% by weight of perfluoro-n-hexane, 14 to 20% by weight of isohexane and 15 to 21% by weight of ethyltrichloroacetate, said composition having an azeotropic boiling point of 42.degree. to 46.degree. C. at ambient pressure.

A cleaning apparatus including at least one cleaning tank, optionally a purging or rinsing tank, and a vapor cleaning and drying tank, wherein each tank is disposed in a lateral arrangement, wherein at least one of the tanks contains a mixed solvent composition consisting essentially of 70-85% by weight of perfluoro-n-hexane and 15-30% by weight of isohexane, said composition having an azeotropic boiling point of 44.degree.-48.degree. C. at ambient pressure.

A cleaning apparatus including at least one cleaning tank, optionally a purging or rinsing tank, and a vapor cleaning and drying tank, wherein each tank is disposed in a lateral arrangement, wherein at least one of the tanks contains a mixed solvent composition consisting essentially of 70-85% by weight of perfluoro-n-hexane and 15-30% by weight of diisopropyl ether, said composition having an azeotropic boiling point of 47.degree.-51.degree. C. at ambient pressure.

A cleaning apparatus including at least one cleaning tank, optionally a purging or rinsing tank, and a vapor cleaning and drying tank, wherein each tank is disposed in a lateral arrangement, wherein at least one of the tanks contains a mixed solvent composition consisting essentially of 60-70% by weight of perfluoro-n-hexane, 14 to 20% by weight of isohexane and 15-21% by weight of ethyltrichloroacetate, said composition having an azeotropic boiling point of 42.degree.-46.degree. C. at ambient pressure.