Process for the production of semiconductor foils and their use
AssigneeBayer Aktiengesellschaft
InventorsPhilippe Knauth, Horst Lange, Ingo Schwirtlich, Karsten Wambach
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Abstract
High purity semiconductor foils, such as silicon foils useful in solar energy cells, are produced by treating an impure semiconductor foil with at least one reactive gas while in the crystallizing state.
Claims12
A process for the production of high-purity semiconductor foils which comprises treating semiconductor foils having an upper surface with reactive gases in the directionally crystallizing state to deplete volatile compounds of impurities from the upper surface of the foil through escape with the reactive gases, the crystallization direction being parallel to a vector normal to the upper surface of the foil.
A process as claimed in claim i wherein the treatment is carried out in the region of the two-phase zone between the molten phase and the solid phase.
Dependencies are inferred from the claim text.