Pressure sensor with moisture resistance and uniform characteristics

A pressure sensor, comprising:

• a main body including a pressure inlet at an end thereof, a deformable section deformed by a pressure introduced through the pressure inlet, and a non-deformable section maintaining a shape thereof even when supplied with a pressure introduced through the pressure inlet;
• an amorphous magnetic alloy member having a magnetostriction constant, the amorphous magnetic alloy member being adhered on the deformable section and the non-deformable section;
• a first permeability detection element for detecting the permeability of a part of the amorphous magnetic alloy member corresponding to the deformable section;
• a second permeability detection element for detecting the permeability of another part of the amorphous magnetic alloy member corresponding to the non-deformable section;
• and
• a yoke for covering the first and the second permeability detection elements, the yoke being adhered on the main body,
• wherein the amorphous magnetic alloy member and the first and the second permeability detection elements are included in a magnetic circuit, and pressure detection is performed based on the difference between the permeability detected by the first permeability detection element and the permeability detected by the second permeability detection element, the difference being caused by application of pressure, and
• wherein a space enclosed by the yoke and the main body is filled with a resin.

A pressure sensor, comprising:

• a main body including a pressure inlet at an end thereof, a deformable section deformed by a pressure introduced through the pressure inlet, and a non-deformable section maintaining a shape thereof even when supplied with a pressure introduced through the pressure inlet;
• an amorphous magnetic alloy member having a magnetostriction constant, the amorphous magnetic alloy member being adhered on the deformable section and the non-deformable section;
• a first permeability detection element for detecting the permeability of a part of the amorphous magnetic alloy member corresponding to the deformable section;
• a second permeability detection element for detecting the permeability of another part of the amorphous magnetic alloy member corresponding to the non-deformable section;
• and
• a yoke for covering the first and the second permeability detection elements, the yoke being adhered on the main body,
• wherein the amorphous magnetic alloy member and the first and the second permeability detection elements are included in a magnetic circuit, and pressure detection is performed based on the difference between the permeability detected by the first permeability detection element and the permeability detected by the second permeability detection element, the difference being caused by application of pressure, and
• wherein the first and the second permeability detection elements are obtained by forming two identical patterns formed on a flexible substrate and adhering the substrate on an outer peripheral surface of the amorphous magnetic alloy member.

A pressure sensor, comprising:

• a main body including a pressure inlet at an end thereof, a deformable section deformed by a pressure introduced through the pressure inlet, and a non-deformable section maintaining a shape thereof even when supplied with a pressure introduced through the pressure inlet;
• an amorphous magnetic alloy member having a magnetostriction constant, the amorphous magnetic alloy member being adhered on the deformable section and the non-deformable section;
• a first permeability detection element for detecting the permeability of a part of the amorphous magnetic alloy member corresponding to the deformable section;
• a second permeability detection element for detecting the permeability of another part of the amorphous magnetic alloy member corresponding to the non-deformable section;
• and
• a yoke for covering the first and the second permeability detection elements,
• wherein the amorphous magnetic alloy member and the first and the second permeability detection elements are included in a magnetic circuit, and pressure detection is performed based on the difference between the permeability detected by the first permeability detection element and the permeability detected by the second permeability detection element, the difference being caused by application of pressure, and
• wherein the first and the second permeability detection elements are obtained by forming two identical patterns formed on a flexible substrate and adhering the substrate on an outer peripheral surface of the amorphous magnetic alloy member.

A pressure sensor, comprising:

• a main body including a pressure inlet at an end thereof, a deformable section deformed by a pressure introduced through the pressure inlet, and a non-deformable section maintaining a shape thereof even when supplied with a pressure introduced through the pressure inlet;
• an amorphous magnetic alloy member having a magnetostriction constant, the amorphous magnetic alloy member being adhered on the deformable section and the non-deformable section;
• a first permeability detection element for detecting the permeability of a part of the amorphous magnetic alloy member corresponding to the deformable section;
• a second permeability detection element for detecting the permeability of another part of the amorphous magnetic alloy member corresponding to the non-deformable section;
• and
• a yoke for covering the first and the second permeability detection elements,
• wherein the amorphous magnetic alloy member and the first and the second permeability detection elements are included in a magnetic circuit, and pressure detection is performed based on the difference between the permeability detected by the first permeability detection element and the permeability detected by the second permeability detection element, the difference being caused by application of pressure, and
• wherein the yoke is formed of a magnetic material having a magnetostriction constant, the absolute value of which is 1.times.10.sup.-6 at the maximum.

A pressure sensor, comprising:

• a main body including a pressure inlet at an end thereof, a deformable section deformed by a pressure introduced through the pressure inlet, and a non-deformable section maintaining a shape thereof even when supplied with a pressure introduced through the pressure inlet;
• an amorphous magnetic alloy member having a magnetostriction constant, the amorphous magnetic alloy member being adhered on the deformable section and the non-deformable section;
• a first permeability detection element for detecting the permeability of a part of the amorphous magnetic alloy member corresponding to the deformable section;
• a second permeability detection element for detecting the permeability of another part of the amorphous magnetic alloy member corresponding to the non-deformable section;
• and
• a yoke for covering the first and the second permeability detection elements,
• wherein the amorphous magnetic alloy member and the first and the second permeability detection elements are included in a magnetic circuit, and pressure detection is performed based on the difference between the permeability detected by the first permeability detection element and the permeability detected by the second permeability detection element, the difference being caused by application of pressure,
• wherein the first and the second permeability detection elements are obtained by forming two identical patterns formed on a flexible subs%rate and adhering the substrate on an outer peripheral surface of the amorphous magnetic alloy member, and
• wherein the yoke is formed of a magnetic material having a magnetostriction constant, the absolute value of which is 1.times.10.sup.-6 at the maximum.