Testing apparatus and connection method for the testing apparatus

A testing apparatus comprising:

• a probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements;
• a test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position;
• a connection member, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being movably supported by the test head;
• a head plate for supporting the probe card;
• moving means for moving the probe card between a test position near the head plate and a wait position away from the head plate;
• and
• a movement limiting member for limiting movement of the connection member towards the test head and applying a pressing force to the connection member and the probe card via the second contact elements in cooperation with the moving means, when the probe card is shifted from the wait position to the test position by the moving means;
• wherein said movement limiting member is attached to the head plate, and wherein said movement limiting member has a stopper, said connection member has a flange, and the flange is engaged with the stopper, thereby limiting movement of the connection member.

A connection method for connecting a test head and a probe card in a testing apparatus comprising the probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements;

• the test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position;
• and a connection member, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being movably supported by the test head, said connection method comprising the steps of:
• moving the test head from the retreat position to the test position and fixing the test head;
• limiting movement of the connection member towards the test head when the test head has been fixed in the test position;
• and
• moving the probe card towards the connection member and bringing the second contact elements into contact with the electrodes of the probe card with a pressing force provided by the movement of the connection member.