Method of control of plasma stream and plasma apparatus
AssigneeOverseas Publishers Association
InventorsVladimir Ivanov, Pavel P. Kulik, Alexis N. Logoshin
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AssigneeOverseas Publishers Association
InventorsVladimir Ivanov, Pavel P. Kulik, Alexis N. Logoshin
Estimating the term…
A plasma stream is formed by plural plasma-forming gas through which electric currents are passed and on which a magnetic field is superposed a physical parameter of the plasma stream is monitored. The magnitude of force acting on one of the jets is varied until a required result is obtained. Plural plasma burners arranged at an angle to each other are connected to a power supply and a plasma-forming gas source. Each burner incudes an open magnetic circuit with a solenoid connected to another power supply. The physical parameters of the plasma stream are recorded. The recorder is connected to a processor having connected to both power supplies and plasma-forming gas source. The burners include a drive also connected to the processing unit.
A plasma apparatus comprising at least two plasma burners arranged at an angle relative to each other for forming a total plasma stream, the burners being connected to a power supply and to a plasma-forming gas source;
A plasma apparatus comprising at least two plasma burners arranged at an angle relative to each other for forming a total plasma stream, the burners being connected to a power supply and to a plasma-forming gas source;
A method of monitoring and controlling a characteristic of a total plasma stream formed by at least two converging plasma-forming gas jets which are acted on by electric currents flowing therethrough and by a magnetic field superposed on each jet, comprising the steps of monitoring a physical parameter of the total plasma stream, and in response to changes of said parameter varying (i) the intensity of a magnetic field superposed on the plasma-forming gas jets and (ii) at least one of the flow rate of the plasma-forming gas and the angle of convergence of the plasma-forming gas jets until required values of the monitored physical parameters of the total plasma stream are attained.
A method of controlling a total plasma stream formed by at least two converging plasma-forming gas jets which are acted on by electric currents flowing therethrough and by a magnetic field superposed on each jet, comprising monitoring the cross-sectional dimension of the total plasma stream, and in response to changes in said monitored cross-sectional dimension, varying the total plasma stream by controlling the intensity of the magnetic field superposed on at least one of the converging plasma jets, and varying the cross-sectional dimension of the plasma stream by changing the flow rate of plasma-forming gas in at least one of the converging plasma jets.
A method of controlling a total plasma stream formed by at least two converging plasma-forming gas jets which are acted on by electric currents flowing therethrough and by a magnetic field superposed on each jet, comprising monitoring the brightness distribution of the total plasma stream, and in response to changes in said monitored brightness distribution, varying the intensity of the magnetic field superposed on at least one of the converging plasma jets.
A method of controlling a total plasma stream formed by at least two converging plasma-forming gas jets which are acted on by electric currents flowing therethrough and by a magnetic field superposed on each jet, comprising monitoring a spectral radiation factor distribution of the total plasma stream, and in response to changes in said monitored spectral radiation factor distribution, varying the plasma-forming gas composition of at least one of the jets.
A method of controlling a total plasma stream formed by at least two converging plasma-forming gas jets which are acted on by electric currents flowing therethrough and by a magnetic field superposed on each jet, comprising monitoring the ion concentration of the total plasma stream, and in response to changes in said monitored ion concentration, varying the plasma-forming gas composition in at least one of the plasma jets.
Dependencies are inferred from the claim text.