Method for forming a photoelectric conversion device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
Life of this patent
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Abstract
A method for forming a photoelectric conversion device, which comprises forming at least one of the constituent elements of the photoelectric conversion device on a photoelectric conversion region having established on either surface or both surfaces of a substrate for forming thereon the photoelectric conversion device, and then separating the substrate into two parts by a plane being incorporated between the two surfaces.
Claims25
A method for forming a photoelectric conversion device comprising the steps of:
- forming said photoelectric conversion device on or within a front surface and a rear surface of a substrate;
- and
- cutting said substrate into two pieces in order to separate said front surface and said rear surface from one another after said forming step.
A method for forming a photoelectric conversion device comprising the steps of:
- forming regions of one conductivity type in a front surface portion and a rear surface portion of a semiconductor substrate of another conductivity type different from said one conductivity type so that junctions of said one conductivity type and said another conductivity type may be formed in said substrate;
- forming electrodes on said substrate and in contact with said regions;
- and
- cutting said substrate into two pieces in order to separate said front surface portion and said rear surface portion from one another, each having corresponding one of said junctions.
A method for forming a photoelectric conversion device comprising:
- forming two substrates each having provided thereon a photoelectric conversion device from one substrate by forming a photoelectric conversion device on each of a front surface portion and a rear surface portion of said one substrate and subsequently cutting said one substrate into said two substrates in order to separate said front surface portion and said rear surface portion.
Dependencies are inferred from the claim text.