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US 5,489,233 AGranted
Polishing pads and methods for their use
AssigneeRodel, Inc.
InventorsLee M. Cook, John V. H. Roberts, Charles W. Jenkins, Raj R. Pillai
Life of this patent
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AssigneeRodel, Inc.
InventorsLee M. Cook, John V. H. Roberts, Charles W. Jenkins, Raj R. Pillai
Estimating the term…
An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.
An improved polishing pad comprising a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and smell flow channels which together permit the transport of polishing slurry containing particles across the surface of the polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
A layered polishing pad comprising two or more layers of polymeric materials wherein the surface layer is comprised of a solid uniform polymer sheet with no intrinsic ability to absorb or transport slurry particles, said sheet in use having a surface texture or pattern comprising both large and small flow channels which together permit the transport of polishing slurry containing particles across the surface of the polishing pad, said surface texture being produced solely by external means upon the surface of said solid uniform polymer sheet.
A method for polishing the surface of an article comprising:
Dependencies are inferred from the claim text.