High-temperature pressure sensor

A high-temperature pressure sensor comprising:

• a housing having a bore surrounded by a cylindrical wall;
• a diaphragm portion closing an opening of said bore, said diaphragm portion having a peripheral edge portion fixed to said cylindrical wall and a pressure acting surface deflectable in an axial direction of said cylindrical wall, wherein said diaphragm portion is configured to be self-compensating for thermal expansion;
• a deflection sensing element provided in said bore;
• a pressure transmitting member interposed between said diaphragm portion and said deflection sensing element for transmitting deflection of said pressure acting surface to said deflection sensing element;
• and
• a heat insulating member, independent of said diaphragm portion, for shielding said pressure acting surface of said diaphragm portion,
• wherein said diaphragm portion is a single element and includes a central bottom portion and an outer peripheral portion connected to said central bottom portion by an annular tapered portion therebetween, wherein said central bottom portion is recessed into said bore relative to said outer peripheral portion located therearound, wherein a thickness of said tapered portion is no greater than a thickness of said central bottom portion and said outer peripheral portion.

A high-temperature pressure sensor comprising:

• a housing having a bore defined by a cylindrical wall;
• a diaphragm portion closing an opening of said bore, said diaphragm portion having a peripheral edge portion fixed to said cylindrical wall and a pressure acting surface deflectable in an axial direction of said cylindrical wall, said diaphragm portion including a central bottom portion and an outer peripheral portion disposed around said central bottom portion, said central bottom portion being recessed relative to said outer peripheral portion;
• a deflection sensing element provided in said bore;
• a pressure transmitting member interposed between said diaphragm portion and said deflection sensing element for transmitting deflection of said pressure acting surface to said deflection sensing element;
• a heat insulating member for shielding said pressure acting surface of said diaphragm portion, said heat insulating member being a disk-shaped plate extending parallel to said pressure acting surface and spaced from said pressure acting surface via a shaft portion provided at a center of said pressure acting surface.

A high-temperature pressure sensor comprising:

• a housing having a bore defined by a cylindrical wall;
• a diaphragm portion closing an opening of said bore, said diaphragm portion having a peripheral edge portion fixed to said cylindrical wall and a pressure acting surface deflectable in an axial direction of said cylindrical wall;
• a deflection sensing element provided in said bore;
• a pressure transmitting member interposed between said diaphragm portion and said deflection sensing element for transmitting deflection of said pressure acting surface to said deflection sensing element;
• and
• a heat insulating member for shielding said pressure acting surface of said diaphragm portion, said heat insulating member being a disk-shaped plate extending parallel to said pressure acting surface and spaced from said pressure acting surface via a shaft portion provided at a center of said pressure acting surface of said diaphragm portion.