Nozzles for ink jet devices and method for microfabrication of the nozzles

A method for microfabricating a nozzle structure for use in ink jet printing devices, said nozzle structure comprising a semiconductor wafer defining a low index crystallographic plane and a bore having an axis substantially perpendicular to said low index crystallographic plane, the method comprising the steps of:

• applying ion beams to said low index crystallographic plane, said ion beams having a substantially perpendicular angle of incidence upon said low index crystallographic plane;
• eroding at an angle said low index crystallographic plane in a region surrounding said bore to define a plurality of high index crystallographic planes;
• exposing said low index crystallographic plane and said plurality of high index crystallographic planes to an anisotropic chemical etchant;
• and
• chemically etching, using said anisotropic chemical etchant, said low index crystallographic plane at an etching rate greater than an etching rate of said plurality of high index crystallographic planes to create a nozzle structure surrounding the bore.

A one-piece ink jet nozzle for use in printing devices comprising:

• a (100) silicon wafer having a surface;
• at least one through opening of a dimension oriented perpendicular to said surface;
• and
• an extension lip comprising a wall member of dimensions having an outer dimension surface and an inner dimension surface, said inner dimension surface having a corresponding first axial length and said outer dimension surface having a corresponding second axial length greater than said first axial length, and an angled connection portion comprising a geometrical section connecting said inner diameter surface and said outer diameter surface.

An ink jet nozzle comprising:

• a body member having a surface;
• at least one through opening of a perimeter oriented perpendicular to said surface;
• and
• an extension member comprising a wall member having dimensions and having an outer perimeter surface and an inner perimeter surface;
• said extension member being offset and aligned with said perimeter of said through opening, said inner perimeter surface having a first length and said outer perimeter surface having a second length different than said first length.