Boron-containing organic group-V compounds useful for gas phase deposition of the group-V element on substrates
AssigneeMerck Patent GmbH
InventorsLudwig Pohl, Herbert Schumann, Christian Marschall
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Abstract
The invention relates to the use of boron-containing organic group-V compounds for the deposition of the elements of the Vth main group on substrates by gas-phase deposition.
Claims9
A method which comprises subjecting a boron-containing, Group VA element-containing organic compound to gas-phase deposition conditions in the presence of a substrate to deposit a Group VA element on the substrate wherein the boron-containing, Group VA element-containing organic compound is a compound of one of the following formulae:
- (R.sup.1).sub.3-m E(X-BR.sup.2 R.sup.3).sub.m ##STR8## wherein E is nitrogen, phosphorus, arsenic or antimony,
- m is 1, 2 or 3,
- X is --(CHR.sup.4).sub.n -- ##STR9## A is a phenyl, cyclohexyl, cyclohexenyl or cyclohexadienyl ring, B is a cyclopentyl, cyclopentenyl or cyclopentadienyl ring,
- n is 1, 2, 3, 4, 5 or 6,
- p and q are each, independently of one another, 0, 1, 2, 3, or 4,
- Y is an alkylene or alkylidene group having 3-7 C atoms, in which one or more H atoms may be replaced by R.sup.5, and, optionally, one or more non-adjacent double bonds are present in the alkylidene group,
- s in each case is 1, 2, 3 or 4,
- r and t are each 0 or 1, while
- r+t is 1,
- R.sup.1, R.sup.2 and R.sup.3 are each, independently of one another, H, an alkyl group having 1 to 8 C atoms, which group may be partially or completely fluorinated, a cycloalkyl or cycloalkenyl group having 3-8 C atoms or an aryl group and
- R.sup.4 in each case is H or an alkyl group having 1-4 C atoms which may also be partially or completely fluorinated.
In a process for preparing a substrate with a layer thereon by element deposition from the gas phase, the improvement wherein a boron-containing Group VA element-containing compound of one of the following formula I, II, III or IV is employed for the deposition of a Group VA element-containing compound is a compound of one of the following formulae I, II, III or IV:
- ##STR10## wherein E is nitrogen, phosphorus, arsenic or antimony,
- m is 1, 2 or 3,
- X is --(CHR.sup.4).sub.n -- ##STR11## A is a phenyl, cyclohexyl, cyclohexenyl or cyclohexadienyl ring, B is a cyclopentyl, cyclopentenyl or cyclopentadienyl ring,
- n is 1, 2, 3, 4, 5 or 6,
- p and q are each, independently of one another, 0, 1, 2, 3, or 4
- Y is an alkylene or alkylidene group having 3-7 C atoms, in which one or more H atoms may be replaced by R.sup.5, and, optionally, one or more non-adjacent double bonds are present in the alkylidene group,
- s in each case is 1, 2, 3 or 4,
- r and t are each 0 or 1, while
- r+t is 1,
- R.sup.1, R.sup.2, R.sup.3, R.sup.5 and R.sup.6 are each, independently of one another, H, an alkyl group having 1 to 8 C atoms, which group may be partially or completely fluorinated, a cycloalkyl or cycloalkenyl group having 3-8 C atoms or an aryl group and
- R.sup.4 in each case is H or an alkyl group having 1-4 C atoms which may also be partially or completely fluorinated.
Dependencies are inferred from the claim text.