Mounting apparatus for cryogenic aerosol cleaning
AssigneeInternational Business Machines Corporation
InventorsWilliam A. Cavaliere, Robert P. Kuder, II, Jin J. Wu
Life of this patent
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AssigneeInternational Business Machines Corporation
InventorsWilliam A. Cavaliere, Robert P. Kuder, II, Jin J. Wu
Estimating the term…
An apparatus for mounting to a tool having a surface to be cleaned for producing aerosol from a substance for cleaning the surface, includes a flange for mounting to the tool having the surface to be cleaned. A nozzle is mounted to the flange for receiving the substance. The nozzle has at least one exit opening which allows passing of the substance therethrough for expanding the substance from a first pressure to a second pressure which is lower than the first pressure for solidifying at least a substantial portion of the substance and producing aerosol for cleaning the surface. Condensation preventing means is provided for preventing condensation from forming on surfaces of the apparatus and the surface to be cleaned, and contamination preventing means is provided for preventing contaminants from re-contaminating the surface subsequent to removal therefrom.
An apparatus for mounting to a tool which has a surface to be cleaned, and for producing aerosol from a substance for cleaning the surface, comprising:
An apparatus for mounting to a tool which has a surface to be cleaned, and for producing aerosol from a substance for cleaning the surface, comprising:
Dependencies are inferred from the claim text.