Method of calibrating a thickness measuring device and device for measuring or monitoring the thickness of layers, tapes, foils, and the like
AssigneeMicro-Epsilon Messtechnik GmbH & Co. KG
InventorsKarl Wisspeintner, Roland Mandl
Life of this patent
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Abstract
A method of calibrating a thickness measuring device having preferably two noncontacting or scanning displacement measuring sensors (2, 3), which allows to calibrate in a simple manner, at the location of measurement, thickness measuring devices operating by different measuring principles by means of a reference object (7).
Claims12
A method of calibrating a thickness measuring device having at least two noncontacting displacement measuring sensors (2, 3) forming a measuring field, and which is adapted to compensate for the non-linear behavior within the measuring range of the measuring sensors and also for the variable position of the object to be measured within the measuring field, and comprising the steps of
- moving a reference object (7) with a predetermined known thickness (D.sub.ref) within the measuring field (6) of the displacement measuring sensors (2, 3,);
- measuring the distances (A, B) between the respective displacement measuring sensors (2, 3) and the reference object (7) at each of a plurality of relative positions of the reference object (7) toward and away from the sensors within the measuring field;
- determining any measuring error of the thickness measuring device based upon the actual measurements obtained from the displacement sensors (2, 3) and the known thickness of the reference object (7) at each of the relative positions toward and away from the sensors;
- and
- storing the determined measuring error for each of the relative positions so as to permit the thickness measurement of an object which is moved through the measuring field and is susceptible to fluttering toward and away from the sensors, to be corrected for non-linearities of the displacement measuring sensors (2, 3) and for the variable position of the object based upon the measuring error determined for the respective relative position of the object.
An apparatus for measuring the thickness of an object and which is characterized by the ability to be accurately calibrated to compensate for the non-linear behavior within the measuring range of the measuring sensors and also for the variable position of the object to be measured within the measuring field, and comprising
- at least two non-contacting displacement measuring sensors (2, 3) forming a measuring field;
- means for moving a reference object (7) with a predetermined known thickness (D.sub.ref) within the measuring field (6) of the displacement measuring sensors (2, 3) and so that the distances (A, B) between the respective displacement measuring sensors (2, 3) and the reference object (7) at each of a plurality of relative positions of the reference object (7) toward and away from the sensors within the measuring field may be measured;
- means for determining any measuring error of the apparatus based upon the distances (A, B) measured by the displacement measuring sensors (2, 3) and the known thickness of the reference object (7) at each of the relative positions toward and away from the sensors;
- and
- means for storing in a data storage (8) any measuring error of the apparatus determined at each of the relative positions, and so as to permit the thickness measurement of an object which is moved through the measuring field and is susceptible to fluttering toward and away from the sensors, to be corrected for non-linearities of the displacement measuring sensors (2, 3) and for the variable position of the object based upon the stored measuring error for the respective relative position of the object.
A method of calibrating and utilizing a thickness measuring device having at least two noncontacting displacement measuring sensors (2, 3) forming a measuring field, and which is adapted to compensate for the non-linear behavior within the measuring range of the measuring sensors and also for the variable position of the object to be measured within the measuring field, and comprising the steps of
- moving a reference object (7) with a predetermined known thickness (D.sub.ref) within the measuring field (6) of the displacement measuring sensors (2, 3,);
- measuring the distances (A, B) between the respective displacement measuring sensors (2, 3) and the reference object (7) at each of a plurality of relative positions of the reference object (7) toward and away from the sensors within the measuring field;
- determining any measuring error of the thickness measuring device based upon the actual measurements obtained from the displacement sensors (2, 3) and the known thickness of the reference object (7) at each of the relative positions toward and away from the sensors;
- storing the determined measuring error for each of the relative positions;
- moving an object (1) to be measured through the measuring field and so that the object (1) is free to flutter toward and away from the sensors;
- and
- measuring the distances (A, B) between the respective displacement measuring sensors (2, 3) and the object (1) to be measured and determining the measured thickness of the object (1) based upon the measured distances (A, B) while correcting the measured thickness with the stored measuring error associated with the relative position of the object (1) so as to produce a corrected thickness output.
Dependencies are inferred from the claim text.