Method of unsticking components of micro-mechanical devices
AssigneeTexas Instruments Incorporated
InventorsMonte A. Douglas, Robert M. Wallace
Life of this patent
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Abstract
A method of unsticking contacting elements (11, 17) of a micro-mechanical device (30). The device is exposed to either a low surface tension liquid with a surfactant (32) or to a supercritical fluid (62) so as to avoid damage to fragile components of the device (30). The exposure conditions are controlled so as to provide optimum results without damage to the device.
Claims20
A method of unsticking of contacting elements of a micro-mechanical device which has been at least substantially fabricated comprising the steps of:
- immersing said contacting elements in a body of a low surface tension liquid containing a surfactant, after said contacting elements have become stuck;
- and
- drying said device so that pressure equilibrium between said low surface tension liquid and its vapor phase is substantially preserved.
A method of unsticking dry contacting elements of a micromechanical device which has been at least substantially fabricated comprising the step of:
- exposing said containing elements to a supercritical fluid, after said contacting elements have become stuck.
Dependencies are inferred from the claim text.