US 5,481,914 A · Electronics for coriolis force and other sensors

Abstract

Electronics for use in Coriolis and other sensors for reducing errors in the sensor output signal. An off-frequency drive scheme includes a frequency translation circuit in the excitation feedback loop of a sensor system to suppress components of the sensor drive signal at a predetermined frequency so that coupling of the drive signal to the sensor output signal can be readily removed by conventional filtering techniques. An amplifier circuit having a bandpass circuit in cascade with the forward loop gain is provided, with the bandpass circuit having a transfer function approximating one plus a bandpass characteristic, the passband of which corresponds to the information band. This arrangement increases the open-loop gain of the amplifier circuit around the information frequency without affecting the open-loop gain at DC and crossover so as to reduce phase and gain errors around the information frequency. A quadrature nulling system is provided for an in-plane micromechanical gyroscope. A signal having an in-phase component due to Coriolis induced out-of-plane motion and a quadrature component due to mechanical misalignments is mixed with a voltage in-phase with motor position. The mixer output is used to apply a DC potential to motor drive electrodes and is automatically adjusted by the integral compensator until the mixer output is zero, resulting in a nulled quadrature component.

Claims23

Dependent claims

A Coriolis force sensor comprising:

an input transducer receiving a drive voltage signal and converting said drive voltage signal into a force signal having a nonlinear relationship with respect to said drive signal;
a sensor responsive to said force signal from said input transducer and Coriolis forces induced by an inertial input for providing an inertial sense signal having a predetermined frequency and an amplitude related to said inertial input and a force sense signal having said predetermined frequency and an amplitude related to said force signal;
a first output transducer for converting said force sense signal into a feedback voltage signal;
a frequency translation circuit, disposed in a feedback relationship between said output transducer and said input transducer, for suppressing a component of said feedback voltage signal at said predetermined frequency to provide said drive signal;
a second output transducer for converting said inertial sense signal into a sensor output signal indicative of said inertial input;
and
means for reducing error in the sensor output signal, said means including at least one of a circuit for reducing phase error and a circuit for reducing error due to motion of said sensor at ninety degrees out of phase with respect to motion of said sensor due to said Coriolis forces.

4 more elements

A Coriolis force sensor comprising:

an input transducer receiving a drive voltage signal and converting said drive voltage signal into a force signal having a nonlinear relationship with respect to said drive signal;
a sensor responsive to said force signal from said input transducer and Coriolis forces induced by an inertial input for providing an inertial sense signal having a predetermined frequency and an amplitude related to said inertial input and a force sense signal having said predetermined frequency and an amplitude related to said force signal;
a first output transducer for converting said force sense signal into a feedback voltage signal;
a frequency translation circuit, disposed in a feedback relationship between said output transducer and said input transducer, for suppressing a component of said feedback voltage signal at said predetermined frequency to provide said drive signal;
a second output transducer for converting said inertial sense signal into a sensor output signal indicative of said inertial input;
and
means for reducing error in the sensor output signal, said means including at least one of a circuit for reducing phase error and a circuit for reducing error due to motion of said sensor at ninety degrees out of phase with respect to motion of said sensor due to said Coriolis forces;
wherein said Coriolis force sensor is a micromechanical, in-plane gyroscope, having a center stator, a first and a second end stator on opposite sides of said center stator, two proof masses, each suspended between said center stator and a respective end stator, and a plurality of electrodes underlying said proof masses, and wherein said quadrature nulling system comprises:
means for receiving and applying a first supply signal to said center stator of said gyroscope;
means for receiving and applying a second supply signal to each of said first and second end stators;
means for receiving and applying a third supply signal to two electrodes, each underlying a respective one of said proof masses;
an out-of-plane charge amplifier responsive to an out-of-plane signal induced by out-of-plane movements of said proof masses and providing an out-of-plane charge amplifier output;
an in-plane charge amplifier responsive to said first supply signal and providing an in-plane charge amplifier output;
excitation feedback means for receiving said in-plane amplifier output and for providing an excitation feedback output to said means for receiving and applying said second supply signal;
an in-plane gain stage for amplifying said in-plane charge amplifier output and for producing an amplified in-plane output;
an out-of-plane gain stage for amplifying said out-of-plane charge amplifier output and for producing an amplified out-of-plane output;
first mixer means for mixing said amplified out-of-plane output with said amplified in-plane output and for providing a first mixer output;
integrator means for integrating said first mixer output and for providing an integrator output to said means for receiving and applying said second supply signal;
phase shifting means for phase shifting said amplified in-plane output;
and
second mixer means for mixing said phase shifted, amplified output and said amplified out-of-plane output, and for providing a gyroscope output.

18 more elements

A sensor system comprising:

an input transducer receiving a drive signal and converting said drive signal into a force signal having a nonlinear relationship with respect to said drive signal;
a sensor responsive to said drive signal and an external stimulus for providing a pair of sensor output signals having a predetermined frequency, a first one of said sensor output signals being indicative of said force signal and a second one of said sensor output signals being indicative of said external stimulus;
a first output transducer for converting said first sensor output signal into a feedback signal;
a second output transducer for converting said second sensor output signal into a signal indicative of said external stimulus;
and
a frequency translation circuit, disposed in a feedback relationship between said first output transducer and said input transducer, for suppressing a component of said feedback signal at said predetermined frequency to provide said drive signal, wherein said sensor is a Coriolis force sensor and said force signal is proportional to the square of the drive signal, and wherein each of said first and second output transducers comprises a charge amplifier, said sensor further comprising a phase-shifter for shifting the phase of said feedback signal by ninety degrees to provide a phase-shifted signal, wherein said frequency translation circuit comprises:
an amplitude control circuit for providing a DC bias signal indicative of a difference between the amplitude of said phase-shifted signal and a reference signal;
and
a multiplier for multiplying said phase-shifted signal by a periodic commutation signal to provide said drive signal,
wherein said drive signal is a function of said DC bias signal.

7 more elements

A Coriolis force sensor comprising:

a proof mass having a resonant frequency associated therewith and adapted for being vibrated at said resonant frequency in a plane of vibration, said proof mass being responsive to an inertial input about an input axis coincident with said plane of vibration for deflecting out of said plane of vibration as a result of Coriolis forces induced by said inertial input;
and
an electrostatic actuator in electrostatic communication with said proof mass for receiving a drive signal and converting said drive signal into a force signal to vibrate said proof mass, said force signal being nonlinear with respect to said drive signal, wherein said drive signal has no energy at said resonant frequency and said force signal has energy at said resonant frequency.

A tuning fork gyroscope comprising:

a pair of proof masses adapted for being vibrated in a plane at a predetermined frequency, said proof masses being responsive to an input rotational rate about an input axis coincident with said plane for deflecting out of said plane of vibration about an output axis;
a pair of drive electrodes, each one in electrostatic communication with a corresponding one of said pair of proof masses, said drive electrodes receiving a drive signal having an amplitude and a frequency associated therewith and converting said drive signal into a force for vibrating said pair of proof masses in said plane;
a sense electrode for sensing displacement of said proof masses in said plane of vibration to provide an in-plane sensor signal;
a charge amplifier for converting said in-plane sense signal into a feedback voltage signal;
a frequency translation circuit for suppressing a component of said feedback voltage signal at said predetermined frequency, wherein said force has a component at said predetermined frequency.

2 more elements

Dependencies are inferred from the claim text.

Electronics for coriolis force and other sensors

Life of this patent

Electronics for coriolis force and other sensors

Life of this patent

Abstract

Claims23