Solid state image sensor provided with a transparent resin layer having water repellency and oil repellency and flattening a surface thereof

A solid state image sensor having a semiconductor substrate, light receiving portions and electric charge transfer portions formed on the semiconductor substrate, charge transfer electrodes provided opposite to the electric charge transfer portions via an insulating film, and a transparent flattening film covering the light receiving portions and the charge transfer electrodes and having a flat surface while having no micro lens, the solid state image sensor comprising:

• a transparent resin layer which is made of amorphous fluororesin containing perfluoroalkyl group and has water repellency and oil repellency, said transparent resin layer flattening the surface of the solid state image sensor.

A solid state image sensor having a semiconductor substrate, light receiving portions and electric charge transfer portions formed on the semiconductor substrate, charge transfer electrodes provided opposite to the electric charge transfer portions via an insulating film, a transparent flattening film covering the light receiving portions and the charge transfer electrodes and having a flat surface, and micro lenses formed in correspondence with the light receiving portions above the transparent flattening film, the solid state image sensor comprising:

• a transparent resin layer which is made of amorphous fluororesin containing perfluoroalkyl group and has a refractive index lower than the refractive index of the micro lenses, said transparent resin layer covering the micro lenses and filling recesses formed between the adjoining micro lenses and having a flat surface, and
• a transparent protection layer which is made of acrylic resin, has a mechanical strength greater than the mechanical strength of the transparent resin layer and is formed on the transparent resin layer.